2023. 10. 26. 00:03ㆍSubstrates
Next, let's learn about the main mechanisms for each circuit fabrication process.
Major Mechanisms for Each Circuit Fabrication Process
Front Side - DFR Adhesion (Lamination) - Photolithography - Stripping - Etching - AOI
Front Side:
Removal of foreign substances from the substrate surface before adhering the photosensitive film DFR (Rinse - Acid Rinse - Rinse)
DFR Adhesion (Lamination):
Adhesion of photosensitive film using a roller on the substrate that has undergone cleaning
Photolithography:
Exposing the photosensitive film to light according to the product design to cure it
Contact Exposure:
Relatively high resolution achievable
Good UV and energy transmission
Alignment is challenging
Mask damage can occur due to contact with the substrate and mask
Glass mask is necessary for fine pattern compatibility
LDI (Laser Direct Imaging):
No need for a mask
Photolithography process adjusted based on substrate flexibility
Difficult to manage, high cost, and maintenance expenses are substantial
Long tack time for photolithography
Limited availability of usable dry films
LDI Equipment Principle / Structure:
Design is converted to data and transmitted to multiple photolithography heads
Each head uses DMD components to selectively expose the required design in each area
DMD consists of an array of micro mirrors that individually control light exposure at desired positions
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