Scanning Electron Microscope (SEM) (3)

Operating Instructions for Scanning Electron Microscope (SEM), Part 3

 

Continuing from Part 2 of the SEM user manual, today we will delve into the actual imaging techniques.

 

Rather than focusing on the sequence, let's concentrate on the meanings of each button.

 

3. Actual Imaging

Once the vacuum state is achieved, the "beam on" indicator will light up, and you can proceed with the actual imaging.

 

Firstly, the Z (height), WD (Working Distance), and Z values are likely set quite high, meaning the height is set low. You should raise this height. Adjust the height gradually to prevent the sample from touching the lens. For my measurements, which mainly involve substrate molding, I typically set the molding criteria to around 15.

 

Raising the height reduces noise as the distance the electron beam travels is shorter.

 

Next, in the "mode" section, switch to the wide mode to locate your desired imaging position. Once you find the desired position, it's a good idea to switch to the resolution mode.

 

The WD (Working Distance), magnification, and other parameters I will explain further can be adjusted by pressing buttons and turning the wheel.

 

WD refers to focus adjustment. Click on WD and turn the wheel to focus. When you double-click, a region appears, making it easier to adjust the focus within this region. Once the focus is set within the region, you can double-click again to apply the focused adjustment to the entire area.